jipelec jetfirst Rapid Thermal Processor (RTP)

General Specification

1. Max. 4 inches diameter Si Wafer.

2. Ramp rate 100 °C/sec max.

3. Vacuum = 10-2 mbar max.

4.Thermocouple, TC = 20 °C to 1000 °C readable.

5. Pyrometer = 400 °C to 1300 °C readable

6. Max. operating Temp. = 1200 °C 

 
 
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jipelec jetfirst Rapid Thermal Processor (RTP)

SKU: 164881008172
$11,250.00Price