Hydrogen Ion Implanter
Maker: ULVAC (Medium current hydrogen ion implanter)
Model: SMI-60H
Specification
Energy: 35~60keV
Dose: 1.0x1015 ~ 2.0x1017 H2 +ions/cm2
Max Rp : ~600 nm
In 2012
Price : $300,000
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ReScience
DBA of PARMA CnS Inc.
Warehouse in Korea
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